SEMI Optics 기술
Semiconductor Optics Technologies
STEP 01
IQC DUV Laser Vision Inspection Microscope
The DUV microscope for the Incoming Quality Control (demo test) of an over 0.5 N.A. reflective objective lens.
| Item | Specification |
|---|---|
| Source | λ266nm CW DPSS LASER |
| FOV | □180 μm |
| EFL | 5.41 mm |
| Magnification | ×150 |
| N.A. | 0.5 (0.65) |
| W.D. | 8.5 mm (1.7 mm) |
| Pixel Resolution | 30 nm/pixel |
| Optical Resolution | 250 nm |
| Nano Stage Resolution | 1 nm |
STEP 02
묘사기 DUV Laser Vision Inspection Microscope
The CD inspection equipment for evaluating the demo performance of an over 0.8 N.A. CaF2 objective lens.
| Item | Specification |
|---|---|
| Source | λ193 nm Excimer Pulse LASER |
| FOV | □50 μm |
| EFL | 4.0 mm |
| Magnification | ×250 |
| N.A. | 0.8 |
| W.D. | 2.0 mm |
| Pixel Resolution | 25 nm/pixel (3.2 nm/pixel) |
| Optical Resolution | 150 nm |
| Nano Stage Resolution | θxy 0.05 μrad / Z 1 nm |
